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Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 8
作者:  Kuang, S.-Q.;  C. Zhang;  Y.-M. Wang;  X.-Y. Zhou and Y. Xie
浏览  |  Adobe PDF(867Kb)  |  收藏  |  浏览/下载：309/98  |  提交时间：2018/06/13
Electrostatic field assisted micro imprint lithography technology 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 3
作者:  Liu, M.-Z.;  T.-S. Wang;  H.-F. Li;  Z.-Y. Liu;  Z.-L. Chen and W.-X. Yu
浏览  |  Adobe PDF(947Kb)  |  收藏  |  浏览/下载：336/87  |  提交时间：2018/06/13
Cleaning of carbon contamination on multilayer optics of EUVL 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 11
作者:  Song, Y.;  Q.-P. Lu;  X.-P. Gong;  Y. Wang and Z.-Q. Peng
浏览  |  Adobe PDF(603Kb)  |  收藏  |  浏览/下载：313/112  |  提交时间：2018/06/13
Thermal conductivity enhancement design for carbon-fiber truss of space camera 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 9
作者:  Liu, G.;  L. Guo;  R.-C. Hu and Q.-W. Wu
浏览  |  Adobe PDF(473Kb)  |  收藏  |  浏览/下载：340/110  |  提交时间：2018/06/13
Meter-scale thin film coating equipment based on meniscus-coating technology 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 1
作者:  Xu, J.;  W.-B. Xu;  H.-Y. Bu;  Z.-W. Lu;  Z.-K. Liu;  Y.-L. Hong and W.-X. Yu
浏览  |  Adobe PDF(611Kb)  |  收藏  |  浏览/下载：312/109  |  提交时间：2018/06/13