中文版 | English

在结果中检索

CIOMP OpenIR

浏览/检索结果: 共3条，第1-3条 帮助

限定条件            
已选(0)清除 条数/页：   排序方式：
Analysis and correction of the distortion error in a DMD based scanning lithography system 期刊论文
Optics Communications, 2019, 卷号: 434, 页码: 1-6
作者:  Q.K.Li;  Y.Xiao;  H.Liu;  H.L.Zhang;  J.Xu;  J.H.Li
浏览  |  Adobe PDF(1598Kb)  |  收藏  |  浏览/下载：254/51  |  提交时间：2020/08/24
Microlithography,Lithography,Digital image processing,maskless lithography,fabrication,Optics  
A beam homogenizer for digital micromirror device lithography system based on random freeform microlenses 期刊论文
Optics Communications, 2019, 卷号: 443, 页码: 211-215
作者:  Z.Y.Liu;  H.Liu;  Z.F.Lu;  Q.K.Li;  J.H.Li
浏览  |  Adobe PDF(1582Kb)  |  收藏  |  浏览/下载：165/69  |  提交时间：2020/08/24
Homogenizer,Microlens array,Freeform surface,DMD lithography system,laser,optics  
The directional excitation of surface plasmon polaritons by radially polarized beam with multiple off-axis vortices 期刊论文
Optics Communications, 2019, 卷号: 443, 页码: 197-201
作者:  Y.X.Dong;  S.X.Xi;  B.W.Zhu;  X.L.Wang;  Q.Q.Mu;  S.Wang;  Z.Q.Zhu
浏览  |  Adobe PDF(927Kb)  |  收藏  |  浏览/下载：180/59  |  提交时间：2020/08/24
Polarization,Optical vortices,Subwavelength structures,Laser beam,shaping,Surface plasmons,light,Optics