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Interference Fringe Locking by Grating-Shifting Holographic Grating Exposure 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 5
作者:  Song, Y.;  X. Zhao;  Y. Jiang;  Bayanheshig and X. Qi
浏览  |  Adobe PDF(528Kb)  |  收藏  |  浏览/下载：341/109  |  提交时间：2018/06/13
Baseline Fitting of Partial Least Squares for Oxygen A Absorption Band 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 8
作者:  Li, J.;  M. Zhang and D. Zhang
浏览  |  Adobe PDF(607Kb)  |  收藏  |  浏览/下载：368/116  |  提交时间：2018/06/13
Influence and Revising Method of Grating Ruling Engine's Abbe Error on Quality of Grating Wavefront 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Mi, X.;  H. Yu;  H. Yu;  X. Qi;  X. Li and Q. Wan
浏览  |  Adobe PDF(3436Kb)  |  收藏  |  浏览/下载：357/130  |  提交时间：2018/06/13
Impact of carbon contamination cleaning technologies on reflectivity of extreme ultraviolet lithography optics 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 3
作者:  Wang, Y.;  Q. Lu and Y. Gao
浏览  |  Adobe PDF(284Kb)  |  收藏  |  浏览/下载：395/128  |  提交时间：2018/06/13
Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Wang, W.;  S. Jiang;  Y. Song and Bayanheshig
浏览  |  Adobe PDF(4373Kb)  |  收藏  |  浏览/下载：292/96  |  提交时间：2018/06/13
Profile online detection for two-dimensional stage x axis mirror in scanning exposure systems 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 1
作者:  Liu, Z.;  W. Li;  Bayanheshig;  Y. Song;  S. Jiang;  X. Li and Q. Lu
浏览  |  Adobe PDF(420Kb)  |  收藏  |  浏览/下载：327/104  |  提交时间：2018/06/13