Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode

doi:10.37188/CJL.20200362

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	Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode
	L.-Y. Wang; K.-W. Liu; X. Chen; Y.-X. Zhu; Q.-C. Hou and D.-Z. Shen
	2021
发表期刊	Faguang Xuebao/Chinese Journal of Luminescence
ISSN	10007032
卷号	42 期号:2 页码:201-207
摘要	The MgZnO film was grown on the sapphire substrate by the metal organic compound chemical vapor deposition(MOCVD) method. Combined with photolithography and polystyrene(PS) microsphere template technology, the MgZnO ultraviolet detector based on the Ag microporous array electrode structure was fabricated. Compared with devices based on conventional metal film electrodes, the photocurrent of the MgZnO ultraviolet detector based on the microporous array interdigital electrode is increased by nearly 6 times, while its dark current and response time remain basically unchanged. Through the characterization of ultraviolet-visible transmission spectra and electrical properties, the mechanism of the influence of the microporous array structure Ag electrode on the UV photodetection performance of the MgZnO film was discussed. This study provides a feasible way to prepare high-performance UV detectors. 2021, Science Press. All right reserved.
DOI	10.37188/CJL.20200362
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收录类别	EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65240
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	L.-Y. Wang,K.-W. Liu,X. Chen,et al. Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode[J]. Faguang Xuebao/Chinese Journal of Luminescence,2021,42(2):201-207.
APA	L.-Y. Wang,K.-W. Liu,X. Chen,Y.-X. Zhu,&Q.-C. Hou and D.-Z. Shen.(2021).Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode.Faguang Xuebao/Chinese Journal of Luminescence,42(2),201-207.
MLA	L.-Y. Wang,et al."Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode".Faguang Xuebao/Chinese Journal of Luminescence 42.2(2021):201-207.

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