Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode | |
L.-Y. Wang; K.-W. Liu; X. Chen; Y.-X. Zhu; Q.-C. Hou and D.-Z. Shen | |
2021 | |
发表期刊 | Faguang Xuebao/Chinese Journal of Luminescence |
ISSN | 10007032 |
卷号 | 42期号:2页码:201-207 |
摘要 | The MgZnO film was grown on the sapphire substrate by the metal organic compound chemical vapor deposition(MOCVD) method. Combined with photolithography and polystyrene(PS) microsphere template technology, the MgZnO ultraviolet detector based on the Ag microporous array electrode structure was fabricated. Compared with devices based on conventional metal film electrodes, the photocurrent of the MgZnO ultraviolet detector based on the microporous array interdigital electrode is increased by nearly 6 times, while its dark current and response time remain basically unchanged. Through the characterization of ultraviolet-visible transmission spectra and electrical properties, the mechanism of the influence of the microporous array structure Ag electrode on the UV photodetection performance of the MgZnO film was discussed. This study provides a feasible way to prepare high-performance UV detectors. 2021, Science Press. All right reserved. |
DOI | 10.37188/CJL.20200362 |
URL | 查看原文 |
收录类别 | EI |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/65240 |
专题 | 中国科学院长春光学精密机械与物理研究所 |
推荐引用方式 GB/T 7714 | L.-Y. Wang,K.-W. Liu,X. Chen,et al. Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode[J]. Faguang Xuebao/Chinese Journal of Luminescence,2021,42(2):201-207. |
APA | L.-Y. Wang,K.-W. Liu,X. Chen,Y.-X. Zhu,&Q.-C. Hou and D.-Z. Shen.(2021).Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode.Faguang Xuebao/Chinese Journal of Luminescence,42(2),201-207. |
MLA | L.-Y. Wang,et al."Fabrication and Characteristics of MgZnO Ultraviolet Detector Based on Ag Microporous Array Structure Electrode".Faguang Xuebao/Chinese Journal of Luminescence 42.2(2021):201-207. |
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