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A study of nano-structural effect on the polarization characteristics of metallic sub-wavelength grating polarizers in visible wavelengths 期刊论文
Microelectronic Engineering, 2020, 卷号: 227, 页码: 5
作者:  Z. Y. Yang,B. Feng,B. R. Lu,Y. F. Chen,W. H. Li,W. Zhang and T. Li
浏览  |  Adobe PDF(1823Kb)  |  收藏  |  浏览/下载:98/38  |  提交时间:2021/07/06
Refined grating fabrication using Displacement Talbot Lithography 期刊论文
Microelectronic Engineering, 2018, 卷号: 189, 页码: 74-77
作者:  Chen, H.;  Qin, L.;  Chen, Y. Y.;  Jia, P.;  Gao, F.;  Chen, C.;  Liang, L.;  Zhang, X.;  Lou, H. W.;  Ning, Y. Q.;  Wang, L. J.
Adobe PDF(758Kb)  |  收藏  |  浏览/下载:465/134  |  提交时间:2019/09/17
Refined grating fabrication  Displacement Talbot Lithography  Phase  shift mask  Photolighography  interferometric lithography  grids  Engineering  Science & Technology - Other Topics  Optics  Physics  
Strategy and mechanics for bendable micro-light emitting diode array integrated by polymer 期刊论文
Microelectronic Engineering, 2017, 卷号: 179
作者:  Fang, S. W.;  J. Q. Liang;  Z. Z. Liang;  Y. X. Qin;  J. G. Lv and W. B. Wang
Adobe PDF(1161Kb)  |  收藏  |  浏览/下载:257/94  |  提交时间:2018/06/13
Improving the adhesion of hydrogen silsesquioxane (HSQ) onto various substrates for electron-beam lithography by surface chemical modification 期刊论文
Microelectronic Engineering, 2014, 期号: 128, 页码: 59-65
作者:  Zhang Z. Q.;  Duan H. G.;  Wu Y. H.;  Zhou W. P.;  Liu C.;  Tang Y. G.;  Li H. W.
Adobe PDF(5066Kb)  |  收藏  |  浏览/下载:382/124  |  提交时间:2015/04/24
Experimental study on formability of bulk metallic glass as mold for microstructure replication 期刊论文
Microelectronic Engineering, 2012, 卷号: 98, 页码: 142-146
作者:  Mei L.;  Liu J. B.;  Huang Y. J.;  Lin J.;  Shen J.;  Tan J. B.;  Jin P.
收藏  |  浏览/下载:367/0  |  提交时间:2013/03/27