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中国科学院长春光学精密机械与物理研究所
Changchun Institute of Optics,Fine Mechanics and Physics,CAS
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中科院长春光机所知识... [1]
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Patent [1]
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2006 [1]
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1258199 [1]
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深刻蚀平面电磁线圈及制作方法 (发明)
专利
专利类型: 发明专利, 申请日期: 2006-05-31, 公开日期: 2006-05-31
Inventors:
张平
;
吴一辉
;
杨杰伟
;
王淑荣
;
郭占社
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Submit date：2012/08/29
