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The effect of ultrasonic vibration and surfactant additive on fabrication of 53.5 gr mm silicon echelle grating with low surface roughness in alkaline KOH solution 期刊论文
Ultrasonics Sonochemistry, 2018, 卷号: 40, 页码: 937-943
作者:  Jiao, Q. B.;  Zhu, C. L.;  Tan, X.;  Qi, X. D.;  Bayanheshig
Adobe PDF(1078Kb)  |  收藏  |  浏览/下载：267/90  |  提交时间：2019/09/17
Surface roughness  Silicon echelle grating  Ultrasonic agitation  Surfactant additive  extreme-ultraviolet  si  agitation  alcohol  Acoustics  Chemistry  
Study of influence of the removal depth of the silicon modification layer on grating structures in reaction-sintered silicon carbide substrate and improvement method 期刊论文
Applied Optics, 2018, 卷号: 57, 期号: 34, 页码: F1-F7
作者:  Shen, C.;  Tan, X.;  Jiao, Q. B.;  Zhang, W.;  Wang, T. T.;  Li, W. H.;  Wu, N.;  Qi, X. D.;  Bayan, H.
浏览  |  Adobe PDF(1188Kb)  |  收藏  |  浏览/下载：290/94  |  提交时间：2019/09/17
thermal-oxidation  Optics  
Convex blazed grating of high diffraction efficiency fabricated by swing ion-beam etching method 期刊论文
Optics Express, 2018, 卷号: 26, 期号: 19, 页码: 25381-25398
作者:  Shen, C.;  Tan, X.;  Jiao, Q. B.;  Zhang, W.;  Wu, N.;  Bayan, H.;  Qi, X. D.
浏览  |  Adobe PDF(6403Kb)  |  收藏  |  浏览/下载：388/121  |  提交时间：2019/09/17
imaging spectrometer  hyperspectral imager  ultraviolet  algorithm  alignment  design  Optics