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Closed-loop inverse iterative learning control in frequency-domain for electromagnetic driven compliant micro-positioning platform 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2021, 卷号: 29, 期号: 9, 页码: 2149-2157
作者:  X. Zhang;  L.-J. Lai;  P.-Z. Li and L.-M. Zhu
浏览  |  Adobe PDF(1955Kb)  |  收藏  |  浏览/下载:128/41  |  提交时间:2022/06/13
Active control technology to correct the quality of the grating wave-front 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2015, 卷号: 42, 期号: 1
作者:  Yang, C.;  H. Yu;  S. Zhang;  H. Yu;  X. Li and Y. Tang
Adobe PDF(1479Kb)  |  收藏  |  浏览/下载:353/104  |  提交时间:2016/08/24
Design of the controller of the micro-positioning system for large diffraction grating ruling engine 期刊论文
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2015, 卷号: 36, 期号: 2, 页码: 473-480
作者:  Mi, X.;  H. Yu;  J. Gao;  H. Yu;  S. Zhang and X. Qi
浏览  |  Adobe PDF(672Kb)  |  收藏  |  浏览/下载:364/95  |  提交时间:2016/08/24