Design of the controller of the micro-positioning system for large diffraction grating ruling engine

	Design of the controller of the micro-positioning system for large diffraction grating ruling engine
	Mi, X.; H. Yu; J. Gao; H. Yu; S. Zhang and X. Qi
	2015
发表期刊	Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument
卷号	36 期号:2 页码:473-480
摘要	Aiming at the problem that the open-loop control positioning accuracy of diffraction grating ruling engine does not meet the requirement of the specification, the controller of the micro-positioning system was designed under the existing state and structure conditions of the diffraction grating ruling engine. Firstly, the diffraction grating ruling engine is introduced, the micro-positioning system of the diffraction grating ruling engine and its positioning accuracy specification are analyzed. Then, using the system identification method, the frequency sweep experiment of the micro-positioning system is designed, and its mathematical model is established. And then, on the basis of the existing mathematical model, a design method is proposed, which uses the actual measurement data and MATLAB/Simulink software to design the controller with simulation and trial. Using this method, the controller that meets the requirements of the specification was designed. Finally, the designed controller was applied in the micro-positioning system and the simulation ruling experiments were conducted. The experiment results show that the designed controller basically meets the positioning accuracy specification requirement of the micro-positioning system; the peak-peak error is less than 40nm, and the RSM error is slightly larger than 2.8 nm in total. , 2015, Science Press. All right reserved.
文章类型	期刊论文
收录类别	EI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56352
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Mi, X.,H. Yu,J. Gao,et al. Design of the controller of the micro-positioning system for large diffraction grating ruling engine[J]. Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument,2015,36(2):473-480.
APA	Mi, X.,H. Yu,J. Gao,H. Yu,&S. Zhang and X. Qi.(2015).Design of the controller of the micro-positioning system for large diffraction grating ruling engine.Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument,36(2),473-480.
MLA	Mi, X.,et al."Design of the controller of the micro-positioning system for large diffraction grating ruling engine".Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument 36.2(2015):473-480.

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