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Calibration of single optical wedge compensation test system error by computer generation hologram 期刊论文
Chinese Optics, 2022, 卷号: 15, 期号: 1, 页码: 90-100
作者:  Z.-H. Cai;  X.-K. Wang;  H.-X. Hu;  Q. Cheng;  R.-Q. Wang and H.-D. Zhang
浏览  |  Adobe PDF(3890Kb)  |  收藏  |  浏览/下载:84/39  |  提交时间:2023/06/14
CGH encoding with variable step size search 期刊论文
Chinese Optics, 2021, 卷号: 14, 期号: 2, 页码: 368-374
作者:  H.-W. Qiu;  C.-S. Jin;  J. Yu;  Y. Liu;  H.-T. Zhang;  L.-P. Wang and S.-Z. Sun
浏览  |  Adobe PDF(2698Kb)  |  收藏  |  浏览/下载:74/37  |  提交时间:2022/06/13
Flat-field calibration method for large diameter survey mirror aperture splicing 期刊论文
Chinese Optics, 2020, 卷号: 13, 期号: 5, 页码: 1094-1102
作者:  S.-t. Lu,T.-y. Zhang and X.-h. Zhang
浏览  |  Adobe PDF(5066Kb)  |  收藏  |  浏览/下载:110/48  |  提交时间:2021/07/06
Optical coatings for projection objective immersion lithography 期刊论文
Chinese Optics, 2018, 卷号: 11, 期号: 5, 页码: 745-764
作者:  Bi, Dan-Dan;  Zhang, Li-Chao;  Shi, Guang
浏览  |  Adobe PDF(2727Kb)  |  收藏  |  浏览/下载:283/114  |  提交时间:2019/09/17
Optical films  Integrated circuit manufacture  Irradiation  Lithography  Optical coatings  Optical systems