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Key technology progress of optomechanical systems in 193 nm projection objective 期刊论文
Zhongguo Kexue Jishu Kexue/Scientia Sinica Technologica, 2017, 卷号: 47, 期号: 6
作者:  Zhang, D.;  X. Li;  D. Rui;  P. Li;  L. Dong and J. Zhang
caj(2036Kb)  |  收藏  |  浏览/下载:289/101  |  提交时间:2018/06/13
High-performance laser projection display illumination system based on a diffractive optical element 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 10
作者:  Liang, C. Y.;  W. Zhang;  D. W. Rui;  Y. X. Sui and H. J. Yang
浏览  |  Adobe PDF(1070Kb)  |  收藏  |  浏览/下载:329/100  |  提交时间:2018/06/13
Beam Shaping and Speckle Reduction in Laser Projection Display Systems Using a Vibrating Diffractive Optical Element 期刊论文
Current Optics and Photonics, 2017, 卷号: 1, 期号: 1
作者:  Liang, C. Y.;  W. Zhang;  Z. H. Wu;  D. W. Rui;  Y. X. Sui and H. J. Yang
浏览  |  Adobe PDF(2169Kb)  |  收藏  |  浏览/下载:277/92  |  提交时间:2018/06/13
Computational method for simulation of thermal load distribution in a lithographic lens 期刊论文
Applied Optics, 2016, 卷号: 55, 期号: 15
作者:  Yu, X. F.;  M. Y. Ni;  D. W. Rui;  Y. Qu and W. Zhang
Adobe PDF(972Kb)  |  收藏  |  浏览/下载:354/91  |  提交时间:2017/09/11
Beam homogenized shaping and speckle suppression in laser projection display system using liquid crystal on silicon 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 12
作者:  Liang, C.;  W. Zhang;  D. Rui;  Y. Sui and H. Yang
浏览  |  Adobe PDF(1806Kb)  |  收藏  |  浏览/下载:367/128  |  提交时间:2017/09/11
Design of optical elements for beam shaping and uniform illumination in laser digital projection display system 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2015, 卷号: 35, 期号: 8
作者:  Zhang, W.;  C. Liang;  J. Li and D. Rui
caj(3055Kb)  |  收藏  |  浏览/下载:328/95  |  提交时间:2016/08/24
Calibrating the pupil fill balance for hypernumerical aperture lithographic objective 期刊论文
Optical Engineering, 2015, 卷号: 54, 期号: 9, 页码: 6
作者:  Rui, D. W.;  W. Zhang and H. J. Yang
浏览  |  Adobe PDF(7029Kb)  |  收藏  |  浏览/下载:259/93  |  提交时间:2016/07/15
Pupil non-balance calibration for lithographic lens 期刊论文
Zhongguo Jiguang/中文 Journal of Lasers, 2014, 卷号: 41, 期号: 9
作者:  Rui D.;  Shi Z.;  Yuan W.;  Zhang W.
caj(390Kb)  |  收藏  |  浏览/下载:361/69  |  提交时间:2015/04/24