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Quality evaluation of solar magnetic field images at EUV wavelengths in digital image correlation method 期刊论文
Journal of Computational Methods in Sciences and Engineering, 2019, 卷号: 19, 期号: 4, 页码: 1109-1123
作者:  Y.Liu;  K.-F.Song;  J.-L.Ma;  X.-D.Wang;  Z.-W.Han
浏览  |  Adobe PDF(8287Kb)  |  收藏  |  浏览/下载：183/47  |  提交时间：2020/08/24
Image quality,Displacement measurement,Extreme ultraviolet lithography,Image analysis,Magnetic fields,Quality control,Strain measurement  
Design and fabrication of EUV broadband multilayer mirrors with discrete thicknesses 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 10, 页码: 2395-2406
作者:  Kuang, Shang-Qi;  Li, Shuo;  Yang, Hai-Gui;  Huo, Tong-Lin;  Zhou, Hong-Jun
浏览  |  Adobe PDF(985Kb)  |  收藏  |  浏览/下载：658/202  |  提交时间：2019/09/17
Multilayers  Extreme ultraviolet lithography  Fabrication  Mirrors  Reflection  
Detection system of multilayer coating microstructure defects based on differential interference contrast confocal microscopy 期刊论文
Chinese Optics, 2018, 卷号: 11, 期号: 2, 页码: 255-264
作者:  Dai, Cen;  Gong, Yan;  Zhang, Hao;  Li, Dian-Meng;  Xue, Jin-Lai
浏览  |  Adobe PDF(2558Kb)  |  收藏  |  浏览/下载：403/133  |  提交时间：2019/09/17
Multilayers  Coatings  Confocal microscopy  Defects  Diffraction  Extreme ultraviolet lithography  Microstructure