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Measurement of transversal magnification for reduced projection system 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 1
作者:  Xie, Y.;  L.-P. Wang;  B.-Y. Guo;  J. Wang;  L. Miao;  H. Wang and F. Zhou
浏览  |  Adobe PDF(645Kb)  |  收藏  |  浏览/下载:400/125  |  提交时间:2017/09/11
Extreme ultraviolet lithography objective design based on grouping and graphical user interface 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2015, 卷号: 35, 期号: 12
作者:  Wang, J.;  L. Wang;  C. Jin;  L. Miao and Y. Xie
浏览  |  Adobe PDF(4381Kb)  |  收藏  |  浏览/下载:275/107  |  提交时间:2016/08/24