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Design of a varied-line-space plane grating in EUV spectrum 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2015, 卷号: 35, 期号: 1
作者:  Jiang, Y.;  Bayanheshig;  S. Yang;  X. Zhao;  W. Li and N. Wu
Adobe PDF(1560Kb)  |  收藏  |  浏览/下载:397/117  |  提交时间:2016/08/24
Establishment and experimental verification of the photoresist model considering interface slip between photoresist and concave spherical substrate 期刊论文
Aip Advances, 2015, 卷号: 5, 期号: 7, 页码: 10
作者:  Yang, S.;  Bayanheshig;  X. L. Zhao;  S. Xing;  Y. X. Jiang;  N. Wu;  Q. B. Jiao;  W. H. Li and X. Tan
Adobe PDF(2479Kb)  |  收藏  |  浏览/下载:339/70  |  提交时间:2016/07/15