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Research on efficient and stable control of EUV-induced hydrogen plasma 期刊论文
Journal of Applied Physics, 2022, 卷号: 131, 期号: 23, 页码: 9
作者:  Q. J. Mao;  X. P. Gong;  Q. P. Lu;  Y. Song;  D. Z. Wang;  Y. Bai and T. Y. Ma
浏览  |  Adobe PDF(2183Kb)  |  收藏  |  浏览/下载：99/34  |  提交时间：2023/06/14
A new active vibration control method of double crystal monochromator based on FuLMS-ADRC hybrid algorithm 期刊论文
Nuclear Instruments & Methods in Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment, 2022, 卷号: 1029, 页码: 6
作者:  Y. Bai;  X. P. Gong;  Q. P. Lu;  Y. Song;  D. Z. Wang;  Z. Q. Peng;  Z. Zhang;  Q. J. Mao and T. Y. Ma
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Study on the characteristics of atomic hydrogen cleaning carbon contamination on multilayers 期刊论文
Vacuum, 2022, 卷号: 196, 页码: 11
作者:  Y. Song;  Q. P. Lu;  X. P. Gong;  D. Z. Wang;  Z. Zhang;  B. Yu;  S. Yao;  Q. J. Mao;  T. Y. Ma and Y. Bai
浏览  |  Adobe PDF(1994Kb)  |  收藏  |  浏览/下载：177/60  |  提交时间：2023/06/14