Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Study on the characteristics of atomic hydrogen cleaning carbon contamination on multilayers | |
Y. Song; Q. P. Lu; X. P. Gong; D. Z. Wang; Z. Zhang; B. Yu; S. Yao; Q. J. Mao; T. Y. Ma and Y. Bai | |
2022 | |
发表期刊 | Vacuum
![]() |
ISSN | 0042-207X |
卷号 | 196页码:11 |
摘要 | Mo/Si multilayers are widely used in synchrotron radiation beam-lines and extreme ultraviolet lithography machines. With the increasing power of light source, the problem of carboncontamination on multilayers becomes more and more serious. In-situ efficient and non-damage removal of carbon contamination becomes very necessary. Atomic hydrogen has been proved an effective particle to cleaning carbon without damage. However, the mechanism of atomic hydrogen cleaning carbon contamination is not completely understood now and the cleaning rate is slowly. In order to realize efficient and in situ cleaning of carbon contamination by atomic hydrogen, the influence of different conditions on the process of atomic hydrogen cleaning carbon contamination was researched with experiment firstly. Then, the characteristic relationship of working distance, temperature and atomic hydrogen concentration on the cleaning rate was identified to study the mechanism. The cleaning rate could reach 0.0347 nm/min. In the end, the change of optical properties and surface roughness of multilayer after cleaning were analyzed. The result was shown that the reflectivity of the samples could be effectively recovered and the surface roughness of the samples had little change after cleaning. The workhas great significance for realizing the efficient atomic hydrogen cleaning carbon contamination in-situ. |
DOI | 10.1016/j.vacuum.2021.110738 |
URL | 查看原文 |
收录类别 | sci ; ei |
语种 | 英语 |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/67123 |
专题 | 中国科学院长春光学精密机械与物理研究所 |
推荐引用方式 GB/T 7714 | Y. Song,Q. P. Lu,X. P. Gong,et al. Study on the characteristics of atomic hydrogen cleaning carbon contamination on multilayers[J]. Vacuum,2022,196:11. |
APA | Y. Song.,Q. P. Lu.,X. P. Gong.,D. Z. Wang.,Z. Zhang.,...&T. Y. Ma and Y. Bai.(2022).Study on the characteristics of atomic hydrogen cleaning carbon contamination on multilayers.Vacuum,196,11. |
MLA | Y. Song,et al."Study on the characteristics of atomic hydrogen cleaning carbon contamination on multilayers".Vacuum 196(2022):11. |
条目包含的文件 | 下载所有文件 | |||||
文件名称/大小 | 文献类型 | 版本类型 | 开放类型 | 使用许可 | ||
Study on the charact(1994KB) | 期刊论文 | 出版稿 | 开放获取 | CC BY-NC-SA | 浏览 下载 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论