CIOMP OpenIR
Research on efficient and stable control of EUV-induced hydrogen plasma
Q. J. Mao; X. P. Gong; Q. P. Lu; Y. Song; D. Z. Wang; Y. Bai and T. Y. Ma
2022
Source PublicationJournal of Applied Physics
ISSN0021-8979
Volume131Issue:23Pages:9
AbstractWe use the numerical model to study the control method for the ion sputter flux and energy at the surface of multilayer mirrors in hydrogen plasmas induced by extreme ultraviolet (EUV) radiation. This plasma is generated via photoionization by EUV photons with wavelengths at 13.5 nm and collision ionization by high-energy electrons. An electric field is formed by applying different bias voltages to the cylindrically symmetrical cavity and sample holder, which guides the transfer of charged particles and increases their energy. The evolution of pulsed EUV-induced plasma under the field is described by a two-dimension particle-in-cell model and the Monte Carlo simulation to represent collisions between charged particles and background molecules. The results show that the distribution of the electric field varies during the pulse and point out that the secondary electrons, which gain energy from the varying field and generate more plasma by collisions with hydrogen molecules, are crucial plasma sources in this scheme. We then propose a stable and efficient control method for EUV-induced hydrogen plasma by optimizing the cavity structure as an ellipsoid and treating the surface of the cavity in contact with the plasma.
DOI10.1063/5.0088669
URL查看原文
Indexed Bysci ; ei
Language英语
Citation statistics
Document Type期刊论文
Identifierhttp://ir.ciomp.ac.cn/handle/181722/67038
Collection中国科学院长春光学精密机械与物理研究所
Recommended Citation
GB/T 7714
Q. J. Mao,X. P. Gong,Q. P. Lu,et al. Research on efficient and stable control of EUV-induced hydrogen plasma[J]. Journal of Applied Physics,2022,131(23):9.
APA Q. J. Mao,X. P. Gong,Q. P. Lu,Y. Song,D. Z. Wang,&Y. Bai and T. Y. Ma.(2022).Research on efficient and stable control of EUV-induced hydrogen plasma.Journal of Applied Physics,131(23),9.
MLA Q. J. Mao,et al."Research on efficient and stable control of EUV-induced hydrogen plasma".Journal of Applied Physics 131.23(2022):9.
Files in This Item:
File Name/Size DocType Version Access License
Research on efficien(2183KB)期刊论文出版稿开放获取CC BY-NC-SAView Application Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Q. J. Mao]'s Articles
[X. P. Gong]'s Articles
[Q. P. Lu]'s Articles
Baidu academic
Similar articles in Baidu academic
[Q. J. Mao]'s Articles
[X. P. Gong]'s Articles
[Q. P. Lu]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Q. J. Mao]'s Articles
[X. P. Gong]'s Articles
[Q. P. Lu]'s Articles
Terms of Use
No data!
Social Bookmark/Share
File name: Research on efficient and stable control of EU.pdf
Format: Adobe PDF
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.