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Precise calibration of pupil images in pyramid wavefront sensor 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 12
作者:  Liu, Y.;  Q. Q. Mu;  Z. L. Cao;  L. F. Hu;  C. L. Yang and L. Xuan
浏览  |  Adobe PDF(1665Kb)  |  收藏  |  浏览/下载:273/83  |  提交时间:2018/06/13
Extended shift-rotation method for absolute interferometric testing of a spherical surface with pixel-level spatial resolution 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 16
作者:  Liu, Y.;  L. Miao;  W. L. Zhang;  C. S. Jin and H. T. Zhang
浏览  |  Adobe PDF(909Kb)  |  收藏  |  浏览/下载:395/96  |  提交时间:2018/06/13
Low-stress and high-reflectance Mo/Si multilayers for extreme ultraviolet lithography by magnetron sputtering deposition with bias assistance 期刊论文
Applied Optics, 2017, 卷号: 56, 期号: 26
作者:  Yu, B.;  C. S. Jin;  S. Yao;  C. Li;  Y. Liu;  F. Zhou;  B. Y. Guo;  H. Wang;  Y. Xie and L. P. Wang
浏览  |  Adobe PDF(1006Kb)  |  收藏  |  浏览/下载:294/105  |  提交时间:2018/06/13