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Perfect tracking control for fast-steering mirror driven by voice coil motor 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2020, 卷号: 28, 期号: 9, 页码: 1997-2006
作者:  F.-C. Wang,Y.-T. Wang and D.-P. Tian
浏览  |  Adobe PDF(3952Kb)  |  收藏  |  浏览/下载：173/54  |  提交时间：2021/07/06
High-precision position control of a gene sequencer motion stage 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 10, 页码: 2455-2462
作者:  Fu, Yun-Bo;  Guo, Tong-Jian
浏览  |  Adobe PDF(854Kb)  |  收藏  |  浏览/下载：377/165  |  提交时间：2019/09/17
Controllers  Computer control systems  Equations of motion  Frequency domain analysis  Genes  Permanent magnets  Position control  Synchronous motors  
Cleaning of carbon contamination on multilayer optics of EUVL 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2017, 卷号: 25, 期号: 11
作者:  Song, Y.;  Q.-P. Lu;  X.-P. Gong;  Y. Wang and Z.-Q. Peng
浏览  |  Adobe PDF(603Kb)  |  收藏  |  浏览/下载：314/113  |  提交时间：2018/06/13
Online detection of profile deviation for nano precision 2-D stage mirror 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 9
作者:  Liu, Z.-W.;  W.-H. Li;  J.-K. Wang;  S. Jiang;  Y. Song;  M.-Z. Pan and Bayanheshig
浏览  |  Adobe PDF(624Kb)  |  收藏  |  浏览/下载：318/97  |  提交时间：2017/09/11
Optical design of high-numerical aperture lithographic lenses 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 4
作者:  Xu, M.-F.;  W.-B. Pang;  X.-R. Xu;  X.-H. Wang and W. Huang
浏览  |  Adobe PDF(487Kb)  |  收藏  |  浏览/下载：322/87  |  提交时间：2017/09/11
Sub-nanometer precision optical fabrication of CaF2materials 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 11
作者:  Zhang, C.-L.;  L. Xu;  J. Liu;  Z.-L. Ma;  F. Wang;  Y.-Q. Gu;  L. Dai and S.-J. Peng
浏览  |  Adobe PDF(752Kb)  |  收藏  |  浏览/下载：405/114  |  提交时间：2017/09/11
Effect of alignment errors of reticle on distortion in lithographic projection lens 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 3
作者:  Yang, W.;  W. Huang and H.-B. Shang
浏览  |  Adobe PDF(1721Kb)  |  收藏  |  浏览/下载：293/84  |  提交时间：2017/09/11
Forward kinematics of 3-RRR flexure parallel mechanism used in lens micro-adjustment 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 6
作者:  Zhao, L.;  C. Liang;  D.-F. Zhang;  L.-J. Dong and H.-F. Peng
浏览  |  Adobe PDF(762Kb)  |  收藏  |  浏览/下载：314/79  |  提交时间：2017/09/11
Error correction of interferometer detection with high-accuracy rotation method 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2015, 卷号: 23, 期号: 5, 页码: 1297-1303
作者:  Han, D.-S.;  X. He;  Z.-H. Wei and Y.-M. Li
浏览  |  Adobe PDF(1605Kb)  |  收藏  |  浏览/下载：267/82  |  提交时间：2016/08/24