Forward kinematics of 3-RRR flexure parallel mechanism used in lens micro-adjustment

	Forward kinematics of 3-RRR flexure parallel mechanism used in lens micro-adjustment
	Zhao, L.; C. Liang; D.-F. Zhang; L.-J. Dong and H.-F. Peng
	2016
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
卷号	24 期号:6
摘要	In this work, we propose a formation mechanism to explain the relationship between the surface morphology (and microstructure) and dislocations in the In0.82Ga0.18As/InP heterostructure. The In0.82Ga0.18As epitaxial layers were grown on the InP (100) substrate at various temperatures (430 degrees C, 410 degrees C and 390 degrees C) using low pressure metalorganic chemical vapor deposition (LP-MOCVD). Obvious protrusions and depressions were obseved on the surface of the In0.82Ga0.18As/InP heterostructure because of the movement of dislocations from the core to the surface. The surface morphologies of the In0.82Ga0.18As/InP (100) system became uneven with increasing temperature, which was associated with the formation of dislocations. Such research investigating the dislocation of large lattice mismatch heterostructures may play an important role in the future-design of semiconductor films.
文章类型	期刊
收录类别	EI
语种	中文
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/57469
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Zhao, L.,C. Liang,D.-F. Zhang,et al. Forward kinematics of 3-RRR flexure parallel mechanism used in lens micro-adjustment[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2016,24(6).
APA	Zhao, L.,C. Liang,D.-F. Zhang,&L.-J. Dong and H.-F. Peng.(2016).Forward kinematics of 3-RRR flexure parallel mechanism used in lens micro-adjustment.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,24(6).
MLA	Zhao, L.,et al."Forward kinematics of 3-RRR flexure parallel mechanism used in lens micro-adjustment".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 24.6(2016).

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