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Profile online detection for two-dimensional stage x axis mirror in scanning exposure systems 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 1
作者:  Liu, Z.;  W. Li;  Bayanheshig;  Y. Song;  S. Jiang;  X. Li and Q. Lu
浏览  |  Adobe PDF(420Kb)  |  收藏  |  浏览/下载:334/110  |  提交时间:2018/06/13
Online detection of profile deviation for nano precision 2-D stage mirror 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 9
作者:  Liu, Z.-W.;  W.-H. Li;  J.-K. Wang;  S. Jiang;  Y. Song;  M.-Z. Pan and Bayanheshig
浏览  |  Adobe PDF(624Kb)  |  收藏  |  浏览/下载:322/101  |  提交时间:2017/09/11
Error modeling and analysis of photo-electricity telescope based on multi-system theory 期刊论文
Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2016, 卷号: 45, 期号: 8
作者:  Wang, W.;  Y. Zhao;  Y. Cao;  Z. Wang and F. Wang
浏览  |  Adobe PDF(440Kb)  |  收藏  |  浏览/下载:363/107  |  提交时间:2017/09/11
Measurement methods for parallelism of optical paths for vehicle-based laser platform 期刊论文
Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2016, 卷号: 45
作者:  Shi, L.;  N. Chen;  B. Wang;  S. Shao;  C. Yang;  Y. Dong and R. Guo
浏览  |  Adobe PDF(1145Kb)  |  收藏  |  浏览/下载:383/104  |  提交时间:2017/09/11