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Error modeling and analysis of photo-electricity telescope based on multi-system theory
Wang, W.; Y. Zhao; Y. Cao; Z. Wang and F. Wang
2016
发表期刊Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering
卷号45期号:8
摘要Beam alignment is one of the key techniques in the scanning beam interference lithography system. The coincidence degree between the position and the angle of two exposure beams directly affects the groove quality of the produced grating mask. In view of the mutual coupling between the two dimensions of motion in beam adjustment, the convergence condition of the alignment algorithm is derived, and the influence of assembly error between the reflector and the decoupling plane on the alignment performance is analyzed. The analysis shows that due to the presence of assembly error, the performance of the beam alignment system declines, and even leads to the divergence of the alignment algorithm. The convergence of the system can be optimized by adjusting the ratio L2/L1, where L1is the distance between mirror M1and decoupling plane, and L2is the distance between mirror M2and decoupling plane. The experimental results show that when L2/L1is large, performance of the alignment system is poor and the convergence is slow. When L2/L1is relatively small, the beam alignment system can quickly converge to the target position, and the alignment of the beam is effective. The deduction and simulation analysis can provide theoretical guidance for the design of beam alignment systems and whole exposure light paths. 2016, Chinese Lasers Press. All right reserved.
文章类型期刊
收录类别EI
语种中文
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/57246
专题中科院长春光机所知识产出
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GB/T 7714
Wang, W.,Y. Zhao,Y. Cao,et al. Error modeling and analysis of photo-electricity telescope based on multi-system theory[J]. Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,2016,45(8).
APA Wang, W.,Y. Zhao,Y. Cao,&Z. Wang and F. Wang.(2016).Error modeling and analysis of photo-electricity telescope based on multi-system theory.Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering,45(8).
MLA Wang, W.,et al."Error modeling and analysis of photo-electricity telescope based on multi-system theory".Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering 45.8(2016).
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