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Tolerance assurance of interferometer for optical HCB process 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 8, 页码: 1945-1953
作者:  Yao, Dong;  Li, Yu-Peng;  Zhao, Ya;  Wang, Zhi;  Sha, Wei;  Wang, Yong-Xian
浏览  |  Adobe PDF(637Kb)  |  收藏  |  浏览/下载：380/125  |  提交时间：2019/09/17
Interferometers  Catalysis  Degrees of freedom (mechanics)  Fillers  Gravity waves  Laser interferometry  Position control  
Trajectory-fitting and testing error analysis of stage for curved grating etching 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 3, 页码: 588-596
作者:  Shen, Chen;  Tan, Xin;  Zhu, Ji-Wei;  Zhang, Wei;  Qi, Xiang-Dong
浏览  |  Adobe PDF(1093Kb)  |  收藏  |  浏览/下载：285/129  |  提交时间：2019/09/17
Curve fitting  Diffraction gratings  Errors  Etching  
Extended state observer based control of fast step/stare imaging mechanisms 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2018, 卷号: 26, 期号: 8, 页码: 2084-2091
作者:  Huang, Pu;  Yang, Xiu-Li;  Xiu, Ji-Hong;  Li, Jun;  Li, You-Yi;  Xu, Yong-Sen
浏览  |  Adobe PDF(468Kb)  |  收藏  |  浏览/下载：380/120  |  提交时间：2019/09/17
Controllers  Acceleration  State estimation