Design of tilted and decentered anamorphic optical system based on nodal aberration control

doi:10.1016/j.ijleo.2023.171128

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	Design of tilted and decentered anamorphic optical system based on nodal aberration control
	X. Zhang, L. Wang, J. Yu and C. Jin
	2023
发表期刊	Optik
ISSN	00304026
卷号	290
摘要	This paper proposes a design method for tilted and decentered anamorphic projection optics. In this method, the structure is designed in groups according to the magnification requirements; the anamorphic system section's primary aberration is analyzed based on vector aberration theory, the tilted and decentered system section's node behavior is analyzed based on node aberration theory, and spatial ray tracing is used to control the anamorphic optical system's pupil to be elliptical to realize pupil matching between groups. A mathematical aberration balance and constraint control model is established. The node position is used as an evaluation function such that the node is close to or within the full field, thus controlling the primary aberration for the initial system over the full field. The initial system is constructed with increased optimization potential to satisfy the aberration and structural constraints. The initial structure for the tilted and decentered anamorphic projection optics (βx=1/4,βy=1/8) is constructed with the coma and astigmatism nodes close to or within the full field. The structure is then optimized to achieve a wavefront root-mean-square error for the EUV tilted and decentered anamorphic objective with NA= 0.55 of better than 0.025λ (λ = 13.5 nm). © 2023
DOI	10.1016/j.ijleo.2023.171128
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收录类别	ei
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/68206
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. Zhang, L. Wang, J. Yu and C. Jin. Design of tilted and decentered anamorphic optical system based on nodal aberration control[J]. Optik,2023,290.
APA	X. Zhang, L. Wang, J. Yu and C. Jin.(2023).Design of tilted and decentered anamorphic optical system based on nodal aberration control.Optik,290.
MLA	X. Zhang, L. Wang, J. Yu and C. Jin."Design of tilted and decentered anamorphic optical system based on nodal aberration control".Optik 290(2023).

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