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Development and measurement of a parallel-type self-decoupling 2-dimension micro-motion stage
Qi, K.-Q.; Y. Xiang; Y.-L. Ding; C. Fang and Z.-P. Zhou
2017
Source PublicationGuangxue Jingmi Gongcheng/Optics and Precision Engineering
Volume25Issue:7
AbstractDue to traditional serial-type micro-motion stage has disadvantages of incompact structure and low stiffness, a parallel-type self-decoupling 2-dimension micro-motion stage was designed with the advantage of compact structure, high-resolution and high stiffness. Four symmetrical nested parallel guide mechanisms were adopted in this platform to confer it has the features of symmetrical stiffness and self-decoupling. Operation principle of nested parallel guide mechanism was analyzed in this thesis. Simulation of deformation situation of micro-displacement platform on condition of different stresses was conducted via finite element method, and modal analysis was conducted on it. It is verified that this platform has the function of self decoupling, and the actual travel range of micro-displacement platform obtained through experimental measuring, and it is also verified that its output displacement has good linearity. 2017, Science Press. All right reserved.
Indexed Byei
Language中文
Document Type期刊论文
Identifierhttp://ir.ciomp.ac.cn/handle/181722/59154
Collection中科院长春光机所知识产出
Recommended Citation
GB/T 7714
Qi, K.-Q.,Y. Xiang,Y.-L. Ding,et al. Development and measurement of a parallel-type self-decoupling 2-dimension micro-motion stage[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2017,25(7).
APA Qi, K.-Q.,Y. Xiang,Y.-L. Ding,&C. Fang and Z.-P. Zhou.(2017).Development and measurement of a parallel-type self-decoupling 2-dimension micro-motion stage.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,25(7).
MLA Qi, K.-Q.,et al."Development and measurement of a parallel-type self-decoupling 2-dimension micro-motion stage".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 25.7(2017).
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