Optical reflectivity and hardness improvement of hafnium nitride films via tantalum alloying

	Optical reflectivity and hardness improvement of hafnium nitride films via tantalum alloying
	Gu, Z. Q.; H. H. Huang; S. Zhang; X. Y. Wang; J. Gao; L. Zhao; W. T. Zheng and C. Q. Hu
	2016
发表期刊	Applied Physics Letters
卷号	109 期号:23
摘要	As the micro-vibration of a satellite platform restricts the imaging quality of a high-resolution space optical remote sensor, this paper designs a six DOF(Degree of Freedom) platform for the ground test of optical remote sensor alleviation margin in satellite micro-vibration environment. The kinematics and dynamics models of the platform were constructed, and the transfer function, Simulink model of a voice coil actuators were derived. Based on the models, the platform with six DOFs was manufactured. A confirmatory experiment on the vibration acceleration control accuracy of the platform was carried out, in which the micro-vibration frequency of the typical satellite was taken as the input signal. The results show that the relative error of output acceleration has been controlled in 7% in frequencies from 7 Hz to 40 Hz. The platform takes the parallel construct of the stewart model, it has advantages in simpler structure, bigger stiffness and a controllable vibration source, and obtained results meet the requirements of the ground test applications. 2016, Science Press. All right reserved.
文章类型	期刊
收录类别	SCI ; EI
语种	英语
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/56932
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Gu, Z. Q.,H. H. Huang,S. Zhang,et al. Optical reflectivity and hardness improvement of hafnium nitride films via tantalum alloying[J]. Applied Physics Letters,2016,109(23).
APA	Gu, Z. Q..,H. H. Huang.,S. Zhang.,X. Y. Wang.,J. Gao.,...&W. T. Zheng and C. Q. Hu.(2016).Optical reflectivity and hardness improvement of hafnium nitride films via tantalum alloying.Applied Physics Letters,109(23).
MLA	Gu, Z. Q.,et al."Optical reflectivity and hardness improvement of hafnium nitride films via tantalum alloying".Applied Physics Letters 109.23(2016).

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