Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Plasmonic Nanolithography: A Review | |
其他题名 | 论文其他题名 |
Xie Z. H.; Yu W. X.; Wang T. S.; Zhang H. X.; Fu Y. Q.; Liu H.; Li F. Y.; Lu Z. W.; Sun Q.![]() | |
2011 | |
发表期刊 | Plasmonics
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ISSN | 1557-1955 |
卷号 | 6期号:3页码:565-580 |
摘要 | Surface plasmon polaritons (SPPs) has attracted great attention in the last decade and recently it has been successfully applied to nanolithography due to its ability of beyond diffraction limit. This article reviews the recent development in plasmonic nanolithography, which is considered as one of the most remarkable technology for next-generation nanolithography. Nanolithography experiments were highlighted on the basis of SPPs effect. Three types of plasmonic nanolithography methods: contact nanolithography, planar lens imaging nanolithography, and direct writing nanolithography were reviewed in detail, and their advantages and shortages are analyzed and compared, respectively. Finally, the development trend of plasmonic nanolithography is suggested. |
收录类别 | SCI |
语种 | 英语 |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/24722 |
专题 | 中科院长春光机所知识产出 |
推荐引用方式 GB/T 7714 | Xie Z. H.,Yu W. X.,Wang T. S.,et al. Plasmonic Nanolithography: A Review[J]. Plasmonics,2011,6(3):565-580. |
APA | Xie Z. H..,Yu W. X..,Wang T. S..,Zhang H. X..,Fu Y. Q..,...&Sun Q..(2011).Plasmonic Nanolithography: A Review.Plasmonics,6(3),565-580. |
MLA | Xie Z. H.,et al."Plasmonic Nanolithography: A Review".Plasmonics 6.3(2011):565-580. |
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