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Two-step algorithm for removing the rotationally asymmetric systemic errors on grating lateral shearing interferometer 期刊论文
Optics Express, 2018, 卷号: 26, 期号: 11, 页码: 14267-14277
Authors:  Zhang, L.;  Qi, K. Q.;  Xiang, Y.
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spherical surfaces  absolute  deviation  metrology  flat  maps  Optics