Two-step algorithm for removing the rotationally asymmetric systemic errors on grating lateral shearing interferometer

doi:10.1364/oe.26.014267

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	Two-step algorithm for removing the rotationally asymmetric systemic errors on grating lateral shearing interferometer
	Zhang, L.; Qi, K. Q.; Xiang, Y.
	2018
发表期刊	Optics Express
ISSN	1094-4087
卷号	26 期号:11 页码:14267-14277
摘要	The grating lateral shearing interferometer may achieve ultra-high accuracy absolute testing after eliminating the systemic errors from the interferometer itself and the orthogonality problem between two shearing directions. Aiming at the interferometer, we proposed a two-step algorithm for removing the rotationally asymmetric systemic errors from our shearing setup. This rotation method provides a new approach for acquiring the wavefront aberration by choosing the rotation angles with the minimum decentration and to satisfy the immune of systemic errors at the same time. Simulation and experiment verified that it is more propitious to eliminate the systemic errors when it is applied to our shearing setup. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
关键词	spherical surfaces absolute deviation metrology flat maps Optics
DOI	10.1364/oe.26.014267
收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/61207
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Zhang, L.,Qi, K. Q.,Xiang, Y.. Two-step algorithm for removing the rotationally asymmetric systemic errors on grating lateral shearing interferometer[J]. Optics Express,2018,26(11):14267-14277.
APA	Zhang, L.,Qi, K. Q.,&Xiang, Y..(2018).Two-step algorithm for removing the rotationally asymmetric systemic errors on grating lateral shearing interferometer.Optics Express,26(11),14267-14277.
MLA	Zhang, L.,et al."Two-step algorithm for removing the rotationally asymmetric systemic errors on grating lateral shearing interferometer".Optics Express 26.11(2018):14267-14277.

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