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Interference Fringe Locking by Grating-Shifting Holographic Grating Exposure 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 5
作者:  Song, Y.;  X. Zhao;  Y. Jiang;  Bayanheshig and X. Qi
浏览  |  Adobe PDF(528Kb)  |  收藏  |  浏览/下载：316/95  |  提交时间：2018/06/13
Design of Ultraviolet High-Resolution Astigmatic Correction Rowland Holographic Grating 期刊论文
Spectroscopy and Spectral Analysis, 2017, 卷号: 37, 期号: 11
作者:  Zhao, X. L.;  Bayanheshig;  W. H. Li;  Y. X. Jiang;  N. Wu and T. Zhang
浏览  |  Adobe PDF(1418Kb)  |  收藏  |  浏览/下载：304/78  |  提交时间：2018/06/13
New Measuring Method of Diffraction Efficiency for Concave Grating Based on Fourier Optics Principle 期刊论文
Spectroscopy and Spectral Analysis, 2017, 卷号: 37, 期号: 4
作者:  Ma, Z. Y.;  X. D. Qi;  X. T. Li;  Bayanheshig;  X. F. Yao;  Jirigalantu;  S. W. Zhang and H. L. Yu
浏览  |  Adobe PDF(809Kb)  |  收藏  |  浏览/下载：335/123  |  提交时间：2018/06/13
Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2017, 卷号: 37, 期号: 7
作者:  Wang, W.;  Bayanheshig;  M. Pan;  Y. Song and W. Li
浏览  |  Adobe PDF(993Kb)  |  收藏  |  浏览/下载：277/84  |  提交时间：2018/06/13
Design of Spot Size and Optical Path in Scanning Beam Interference Lithography System 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 9
作者:  Wang, W.;  S. Jiang;  Y. Song and Bayanheshig
浏览  |  Adobe PDF(4373Kb)  |  收藏  |  浏览/下载：277/83  |  提交时间：2018/06/13
Profile online detection for two-dimensional stage x axis mirror in scanning exposure systems 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 1
作者:  Liu, Z.;  W. Li;  Bayanheshig;  Y. Song;  S. Jiang;  X. Li and Q. Lu
浏览  |  Adobe PDF(420Kb)  |  收藏  |  浏览/下载：310/89  |  提交时间：2018/06/13