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Optimal design and fabrication method for antireflection coatings for P-polarized 193 nm laser beam at large angles of incidence (68 degrees-74 degrees) 期刊论文
Journal of the Optical Society of America a-Optics Image Science and Vision, 2013, 卷号: 30, 期号: 9
作者:  Jin J. C.;  Jin C. S.;  Li C.;  Deng W. Y.;  Chang Y. H.
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