Optimal design and fabrication method for antireflection coatings for P-polarized 193 nm laser beam at large angles of incidence (68 degrees-74 degrees)

	Optimal design and fabrication method for antireflection coatings for P-polarized 193 nm laser beam at large angles of incidence (68 degrees-74 degrees)
	Jin J. C.; Jin C. S.; Li C.; Deng W. Y.; Chang Y. H.
	2013
发表期刊	Journal of the Optical Society of America a-Optics Image Science and Vision
ISSN	ISBN/1084-7529
卷号	30 期号:9
摘要	Most of the optical axes in modern systems are bent for optomechanical considerations. Antireflection (AR) coatings for polarized light at oblique incidence are widely used in optical surfaces like prisms or multiform lenses to suppress undesirable reflections. The optimal design and fabrication method for AR coatings with large-angle range (68 degrees - 74 degrees) for a P-polarized 193 nm laser beam is discussed in detail. Experimental results showed that after coating, the reflection loss of a P-polarized laser beam at large angles of incidence on the optical surfaces is reduced dramatically, which could greatly improve the output efficiency of the optical components in the deep ultraviolet vacuum range. (C) 2013 Optical Society of America
收录类别	SCI
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/40798
专题	中科院长春光机所知识产出
推荐引用方式 GB/T 7714	Jin J. C.,Jin C. S.,Li C.,et al. Optimal design and fabrication method for antireflection coatings for P-polarized 193 nm laser beam at large angles of incidence (68 degrees-74 degrees)[J]. Journal of the Optical Society of America a-Optics Image Science and Vision,2013,30(9).
APA	Jin J. C.,Jin C. S.,Li C.,Deng W. Y.,&Chang Y. H..(2013).Optimal design and fabrication method for antireflection coatings for P-polarized 193 nm laser beam at large angles of incidence (68 degrees-74 degrees).Journal of the Optical Society of America a-Optics Image Science and Vision,30(9).
MLA	Jin J. C.,et al."Optimal design and fabrication method for antireflection coatings for P-polarized 193 nm laser beam at large angles of incidence (68 degrees-74 degrees)".Journal of the Optical Society of America a-Optics Image Science and Vision 30.9(2013).

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