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Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography 期刊论文
Photonic Sensors, 2019, 卷号: 9, 期号: 4, 页码: 344-355
作者:  Y.Song;  Bayanheshig;  S.Li;  S.Jiang;  W.Wang
浏览  |  Adobe PDF(3307Kb)  |  收藏  |  浏览/下载：198/73  |  提交时间：2020/08/24
Piecewise linear weighted iterative algorithm,beam alignment,scanning,beam interference lithography (SBIL),overshoot suppression,convergence,speed,femtosecond laser,fabrication,gratings,crystal,system,Instruments & Instrumentation,Optics