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Research on Surface Roughness Related Coating Processes of Mo/Si Multilayers 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2020, 卷号: 40, 期号: 10, 页码: 7
作者:  S. Sun,C. Jin,B. Yu,T. Guo,S. Yao,C. Li and W. Deng
浏览  |  Adobe PDF(2105Kb)  |  收藏  |  浏览/下载:395/139  |  提交时间:2021/07/06
Reflection and Resputtering of Mo/Si Atoms During High-Energy Deposition 期刊论文
Guangxue Xuebao/Acta Optica Sinica, 2020, 卷号: 40, 期号: 11, 页码: 8
作者:  S. Sun,C. Jin,B. Yu,T. Guo,S. Yao,C. Li and W. Deng
浏览  |  Adobe PDF(3802Kb)  |  收藏  |  浏览/下载:226/90  |  提交时间:2021/07/06