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Suppression of diffraction stray light in the inner-occulted coronagraph 期刊论文
Zhongguo Kexue Jishu Kexue/Scientia Sinica Technologica, 2019, 卷号: 49, 期号: 11, 页码: 1343-1349
作者:  H.Yuan;  H.Zhang;  M.Sun
浏览  |  Adobe PDF(1852Kb)  |  收藏  |  浏览/下载:407/107  |  提交时间:2020/08/24
Stray light,Diffraction  
Key technology progress of optomechanical systems in 193 nm projection objective 期刊论文
Zhongguo Kexue Jishu Kexue/Scientia Sinica Technologica, 2017, 卷号: 47, 期号: 6
作者:  Zhang, D.;  X. Li;  D. Rui;  P. Li;  L. Dong and J. Zhang
caj(2036Kb)  |  收藏  |  浏览/下载:348/128  |  提交时间:2018/06/13