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Beam homogenized shaping and speckle suppression in laser projection display system using liquid crystal on silicon 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 12
作者:  Liang, C.;  W. Zhang;  D. Rui;  Y. Sui and H. Yang
Adobe PDF(1806Kb)  |  收藏  |  浏览/下载:382/138  |  提交时间:2017/09/11
Research on temperature distribution of deep ultraviolet lithographic projection objective 期刊论文
Zhongguo Jiguang/Chinese Journal of Lasers, 2016, 卷号: 43, 期号: 5
作者:  Yao, C. and Y. Gong
Adobe PDF(8729Kb)  |  收藏  |  浏览/下载:291/114  |  提交时间:2017/09/11