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Effect of alignment errors of reticle on distortion in lithographic projection lens 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 3
作者:  Yang, W.;  W. Huang and H.-B. Shang
Adobe PDF(1721Kb)  |  收藏  |  浏览/下载:310/92  |  提交时间:2017/09/11
Integrated optomechanical analysis and experiments for influence of gravity on wavefront aberration of space camera 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2016, 卷号: 24, 期号: 8
作者:  Dong, D.-Y.;  Z.-L. Li;  D.-L. Xue;  C.-Z. Chen and X.-J. Zhang
Adobe PDF(651Kb)  |  收藏  |  浏览/下载:324/122  |  提交时间:2017/09/11