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Optical coatings for projection objective immersion lithography 期刊论文
Chinese Optics, 2018, 卷号: 11, 期号: 5, 页码: 745-764
作者:  Bi, Dan-Dan;  Zhang, Li-Chao;  Shi, Guang
Adobe PDF(2727Kb)  |  收藏  |  浏览/下载：289/116  |  提交时间：2019/09/17
Optical films  Integrated circuit manufacture  Irradiation  Lithography  Optical coatings  Optical systems  
Development of beam combining technology in mid-infrared semiconductor lasers(invited) 期刊论文
Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2018, 卷号: 47, 期号: 10
作者:  Cao, Yuxuan;  Shu, Shili;  Sun, Fangyuan;  Zhao, Yufei;  Tong, Cunzhu;  Wang, Lijun
Adobe PDF(539Kb)  |  收藏  |  浏览/下载：429/135  |  提交时间：2019/09/17
Semiconductor lasers  Infrared devices  Laser beams