Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Design and assessment of a micro-nano positioning hexapod platform with flexure hinges for large aperture telescopes | |
X. Wang, Y. Y, X. Z, H. C, S. J and W. J | |
2023 | |
发表期刊 | Optics Express
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ISSN | 10944087 |
卷号 | 31期号:3页码:3908-3926 |
摘要 | In order to compensate the optical system bias, which is caused by the change of elevation angle and thermal gradient during the optical alignment of the telescope, a novel high stiffness micro-nano positioning hexapod platform with flexure hinges is proposed in this paper. The novel flexure hinge has a mechanical limit, and its equivalent model is established and analyzed. In addition, in order to speed up the solution process, a novel simplified inverse kinematic model is developed based on the rigid body kinematic theory. Then, an effective rigid-flexible coupling simulation system is built to verify the correctness and applicability of the inverse kinematic model. Finally, a systematic experimental test method and a statistical-based data analysis theory are proposed. The experimental results show that the resolution and repeatability of translation and rotation and lateral stiffness are as follows: 0.3 mm and 0.5 arc sec, ± 0.5 μm and ±0.5 arc sec, 131.6N μm-1 and 133.0N μm-1. The proposed hexapod platform can be used to correct the optical system bias of large-aperture telescopes. © 2023 Optica Publishing Group. |
DOI | 10.1364/OE.476854 |
URL | 查看原文 |
收录类别 | sci ; ei |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/67973 |
专题 | 中国科学院长春光学精密机械与物理研究所 |
推荐引用方式 GB/T 7714 | X. Wang, Y. Y, X. Z, H. C, S. J and W. J. Design and assessment of a micro-nano positioning hexapod platform with flexure hinges for large aperture telescopes[J]. Optics Express,2023,31(3):3908-3926. |
APA | X. Wang, Y. Y, X. Z, H. C, S. J and W. J.(2023).Design and assessment of a micro-nano positioning hexapod platform with flexure hinges for large aperture telescopes.Optics Express,31(3),3908-3926. |
MLA | X. Wang, Y. Y, X. Z, H. C, S. J and W. J."Design and assessment of a micro-nano positioning hexapod platform with flexure hinges for large aperture telescopes".Optics Express 31.3(2023):3908-3926. |
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Design and assessmen(13361KB) | 期刊论文 | 出版稿 | 开放获取 | CC BY-NC-SA | 浏览 下载 |
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