Mid-infrared ChG-on-MgF2 waveguide gas sensor based on wavelength modulation spectroscopy

doi:10.1364/OL.440361

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	Mid-infrared ChG-on-MgF2 waveguide gas sensor based on wavelength modulation spectroscopy
	M. Pi; C. Zheng; H. Zhao; Z. Peng; J. Lang; J. Ji; L. Liang; Y. Zhang; Y. Wang and F. K. Tittel
	2021
发表期刊	Optics Letters
ISSN	1469592
卷号	46 期号:19 页码:4797-4800
摘要	A novel, to the best of our knowledge, mid-infrared chalcogenide (ChG) on magnesium fluoride (MgF2) waveguide gas sensor was fabricated by using the lift-off method. MgF2 was used as a lower cladding layer to increase the external confinement factor for enhancing lightgas interaction. Wavelength modulation spectroscopy (WMS) was used in carbon dioxide (CO2) detection at the wavelength of 4319 nm (2315.2 cm1). The limit of detection for the 1-cm-long sensing waveguide based on WMS is 0.3%, which is 8 times lower than the same sensor using direct absorption spectroscopy (DAS). The combination of WMS with the waveguide gas sensor provides a new measurement scheme for the performance improvement of on-chip gas detection. 2021 Optical Society of America
DOI	10.1364/OL.440361
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收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65420
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	M. Pi,C. Zheng,H. Zhao,et al. Mid-infrared ChG-on-MgF2 waveguide gas sensor based on wavelength modulation spectroscopy[J]. Optics Letters,2021,46(19):4797-4800.
APA	M. Pi.,C. Zheng.,H. Zhao.,Z. Peng.,J. Lang.,...&Y. Wang and F. K. Tittel.(2021).Mid-infrared ChG-on-MgF2 waveguide gas sensor based on wavelength modulation spectroscopy.Optics Letters,46(19),4797-4800.
MLA	M. Pi,et al."Mid-infrared ChG-on-MgF2 waveguide gas sensor based on wavelength modulation spectroscopy".Optics Letters 46.19(2021):4797-4800.

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