Mechanism of a-AlN Surface Morphology Evolution by High Temperature Annealing

doi:10.37188/CJL.20210111

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	Mechanism of a-AlN Surface Morphology Evolution by High Temperature Annealing
	J.-E. Sui; J.-W. Ben; H. Zang; K. Jiang; S.-L. Zhang; B.-L. Guo; Y. Chen; Z.-M. Shi; Y.-P. Jia; D.-B. Li and X.-J. Sun
	2021
发表期刊	Faguang Xuebao/Chinese Journal of Luminescence
ISSN	10007032
卷号	42 期号:6 页码:810-817
摘要	Nonpolar a-AlN is the fundamental method to eliminate quantum-confined Stark effect, and further improve the efficiency of AlGaN-based devices such as light-emitting diodes. However, it is hard to obtain high quality nonpolar a-AlN on heterogeneous substrates because the large and inhomogeneous mismatch between the heterogeneous substrate and the epitaxial layer. High temperature annealing is an effective and repeatable method to improve the quality of AlN templates. However, the physical mechanism is still not clear on how the high temperature annealing method effects the surface morphology of non-polar AlN, which affects the quality improvement of a-AlN. In this work, the surface evolution of the a-AlN with high temperature annealing has been investigated and the mechanism of how the thermal annealing effects on the surface evolution has been explored both by experiment and first-principles calculations. It is found that the Al/N atoms tend to decompose along a-/m-plane AlN and reabsorb along c-plane AlN, which result in the phenomenon that the area of ordered stripes along c-axis increases with higher annealing temperature or longer annealing time. The research will provide deeper understanding on the mechanism of the HTA effect on a-AlN, which will be benefit to the fabrication of a-AlN related devices. 2021, Science Press. All right reserved.
DOI	10.37188/CJL.20210111
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收录类别	EI
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65406
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	J.-E. Sui,J.-W. Ben,H. Zang,et al. Mechanism of a-AlN Surface Morphology Evolution by High Temperature Annealing[J]. Faguang Xuebao/Chinese Journal of Luminescence,2021,42(6):810-817.
APA	J.-E. Sui.,J.-W. Ben.,H. Zang.,K. Jiang.,S.-L. Zhang.,...&D.-B. Li and X.-J. Sun.(2021).Mechanism of a-AlN Surface Morphology Evolution by High Temperature Annealing.Faguang Xuebao/Chinese Journal of Luminescence,42(6),810-817.
MLA	J.-E. Sui,et al."Mechanism of a-AlN Surface Morphology Evolution by High Temperature Annealing".Faguang Xuebao/Chinese Journal of Luminescence 42.6(2021):810-817.

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