Improved performance of SiC radiation detector based on metal-insulator-semiconductor structures

doi:10.1016/j.nima.2021.165166

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	Improved performance of SiC radiation detector based on metal-insulator-semiconductor structures
	Y. P. Jia; Y. T. Shen; X. J. Sun; Z. M. Shi; K. Jiang; T. Wu; H. W. Liang; X. Z. Cui; W. Lu and D. B. Li
	2021
发表期刊	Nuclear Instruments & Methods in Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment
ISSN	0168-9002
卷号	997 页码:6
摘要	SiC is a typical wide bandgap semiconductor that has demonstrated potential applications in radiation detection and imaging, but its performance must be improved from both a material quality and device design standpoint. In this study, based on a theoretical analysis, we found that it is possible to improve the performance of SiC radiation detectors by changing the device structure from a metal/semiconductor to a metal/insulator/semiconductor design and fabricate and evaluate corresponding devices with alpha particle radiation detection. We experimentally confirmed that introducing an SiO2 dielectric layer can effectively improve the energy resolution of detectors, so the effect of the dielectric layer thickness on detectors' performance was further investigated and clarified. We demonstrated that a device with a 100 nm SiO2 dielectric layer on a 15 mu m SiC epitaxial layer achieved the best energy resolution of 0.55% @-40 V under 5.48 MeV alpha particle irradiation. This study provides further insight to accelerate commercial applications of SiC radiation detectors.
DOI	10.1016/j.nima.2021.165166
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收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65328
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. P. Jia,Y. T. Shen,X. J. Sun,et al. Improved performance of SiC radiation detector based on metal-insulator-semiconductor structures[J]. Nuclear Instruments & Methods in Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment,2021,997:6.
APA	Y. P. Jia.,Y. T. Shen.,X. J. Sun.,Z. M. Shi.,K. Jiang.,...&W. Lu and D. B. Li.(2021).Improved performance of SiC radiation detector based on metal-insulator-semiconductor structures.Nuclear Instruments & Methods in Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment,997,6.
MLA	Y. P. Jia,et al."Improved performance of SiC radiation detector based on metal-insulator-semiconductor structures".Nuclear Instruments & Methods in Physics Research Section a-Accelerators Spectrometers Detectors and Associated Equipment 997(2021):6.

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