Imperfections of Scalar Approximation in Calibration of Computer-Generated Holograms for Optical Surface Measurements

doi:10.3390/app11156897

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	Imperfections of Scalar Approximation in Calibration of Computer-Generated Holograms for Optical Surface Measurements
	Y. Y. Bai; Z. Y. Zhang; R. Q. Wang; T. B. Chen; X. Wang and X. J. Zhang
	2021
发表期刊	Applied Sciences-Basel
卷号	11 期号:15 页码:12
摘要	Computer-generated hologram (CGH) null correctors are used as accuracy standards for interferometric measurements of optical surfaces and optical systems. Diffractive optics calibrators (DOCs) have been developed to evaluate the phase tolerance of CGHs based on scalar approximation by measuring variations in duty cycle and etching depth. However, if the grating period of a CGH < 5 lambda, the scalar approximation is not accurate for phase analysis and reconstruction. In this study, the measurement errors of DOCs with small-period CGHs were investigated and experimentally verified. Results show that the imperfections of scalar approximation in CGHs cannot be ignored and the development of rigorous evaluation methods to improve the measurement accuracy of CGHs is of great practical significance.
DOI	10.3390/app11156897
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收录类别	SCI
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65323
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. Y. Bai,Z. Y. Zhang,R. Q. Wang,et al. Imperfections of Scalar Approximation in Calibration of Computer-Generated Holograms for Optical Surface Measurements[J]. Applied Sciences-Basel,2021,11(15):12.
APA	Y. Y. Bai,Z. Y. Zhang,R. Q. Wang,T. B. Chen,&X. Wang and X. J. Zhang.(2021).Imperfections of Scalar Approximation in Calibration of Computer-Generated Holograms for Optical Surface Measurements.Applied Sciences-Basel,11(15),12.
MLA	Y. Y. Bai,et al."Imperfections of Scalar Approximation in Calibration of Computer-Generated Holograms for Optical Surface Measurements".Applied Sciences-Basel 11.15(2021):12.

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