Broadband Anti-Reflection Coatings Fabricated by Precise Time-Controlled and Oblique-Angle Deposition Methods

doi:10.3390/coatings11050492

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	Broadband Anti-Reflection Coatings Fabricated by Precise Time-Controlled and Oblique-Angle Deposition Methods
	X. Guo; X. Q. Quan; Z. Z. Li; Q. Li; B. Z. Zhang; X. Zhang and C. Song
	2021
发表期刊	Coatings
卷号	11 期号:5 页码:10
摘要	Broadband anti-reflection (AR) coatings are essential elements for improving the photocurrent generation of photovoltaic modules and enhancing visibility in optical devices. In this paper, we report a hybrid-structured, anti-reflection coating that combines multi-layer thin films with a single top-oblique deposited layer. By simply introducing this low-refractive index layer, the broadband anti-reflection properties of optical thin films can be improved while simplifying the preparation. Precise time-controlled and oblique-angle deposition (OAD) methods were used to fabricate the broadband AR coating. By accurately measuring and adjusting the design errors for the thin and thick film layers, 22-layer and 36-layer AR coatings on a sapphire substrate with a 400-2000 nm wideband were obtained. This bottom-up preparation process and AR coating design have the potential to significantly enhance the broadband antireflective properties for many optical systems and reduce the manufacturing cost of broadband AR coatings.
DOI	10.3390/coatings11050492
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收录类别	SCI
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/65079
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	X. Guo,X. Q. Quan,Z. Z. Li,et al. Broadband Anti-Reflection Coatings Fabricated by Precise Time-Controlled and Oblique-Angle Deposition Methods[J]. Coatings,2021,11(5):10.
APA	X. Guo,X. Q. Quan,Z. Z. Li,Q. Li,B. Z. Zhang,&X. Zhang and C. Song.(2021).Broadband Anti-Reflection Coatings Fabricated by Precise Time-Controlled and Oblique-Angle Deposition Methods.Coatings,11(5),10.
MLA	X. Guo,et al."Broadband Anti-Reflection Coatings Fabricated by Precise Time-Controlled and Oblique-Angle Deposition Methods".Coatings 11.5(2021):10.

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