Numerical calculation of the mosaic error between mosaic gratings

doi:10.1364/ao.389274

CIOMP OpenIR

	Numerical calculation of the mosaic error between mosaic gratings
	G. J. Yang,X. D. Qi,X. T. Mi,S. W. Zhang,H. Z. Yu,H. L. Yu,X. T. Li and S. Yang
	2020
发表期刊	Applied Optics
ISSN	1559-128X
卷号	59 期号:13 页码:4048-4054
摘要	The theoretical calculation model for a mosaic error was established based on the plane equation for a grating surface and the relationship equation for a mosaic grating surface. A mosaic grating was obtained based on this model. In the experiment, the mosaic error was calculated based on the diffraction wavefronts of two groups of mosaic gratings that were obtained simultaneously with a Zygo interferometer. The difference between the wavefront of the mosaic grating and the average wavefront of the mosaic grating element was 0.031 lambda. The maximum far-field intensity of the mosaic grating was 90% of that without an error. This model provides a theoretical basis for the numerical mosaic between gratings. In addition, the mosaic error can be calculated with this model, and the quality of the mosaic grating can be evaluated. (C) 2020 Optical Society of America
DOI	10.1364/ao.389274
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收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64736
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	G. J. Yang,X. D. Qi,X. T. Mi,S. W. Zhang,H. Z. Yu,H. L. Yu,X. T. Li and S. Yang. Numerical calculation of the mosaic error between mosaic gratings[J]. Applied Optics,2020,59(13):4048-4054.
APA	G. J. Yang,X. D. Qi,X. T. Mi,S. W. Zhang,H. Z. Yu,H. L. Yu,X. T. Li and S. Yang.(2020).Numerical calculation of the mosaic error between mosaic gratings.Applied Optics,59(13),4048-4054.
MLA	G. J. Yang,X. D. Qi,X. T. Mi,S. W. Zhang,H. Z. Yu,H. L. Yu,X. T. Li and S. Yang."Numerical calculation of the mosaic error between mosaic gratings".Applied Optics 59.13(2020):4048-4054.

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