Method for absolute measurement of flat surface

doi:10.1364/ao.403268

CIOMP OpenIR

	Method for absolute measurement of flat surface
	L. S. Yan,F. Z. Li,X. K. Wang,H. D. Zhang,L. Zhang and D. L. Ma
	2020
发表期刊	Applied Optics
ISSN	1559-128X
卷号	59 期号:33 页码:10584-10590
摘要	Interferometry is a relative measurement method for optical surface testing, and thus its testing accuracy depends on the accuracy of the reference surface. Absolute measurement is one of the most effective methods to improve the testing accuracy in interferometry. We present an efficient absolute measurement method based on Zernike polynomial fitting algorithms. With our proposed method, the profiles of both the test surface and the reference surface can be calculated simultaneously. We further carried out simulation analysis to scientifically evaluate the test accuracy of the proposed method. Finally, we conducted actual experiments to demonstrate the feasibility and practicability of our method. (C) 2020 Optical Society of America
DOI	10.1364/ao.403268
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收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64674
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	L. S. Yan,F. Z. Li,X. K. Wang,H. D. Zhang,L. Zhang and D. L. Ma. Method for absolute measurement of flat surface[J]. Applied Optics,2020,59(33):10584-10590.
APA	L. S. Yan,F. Z. Li,X. K. Wang,H. D. Zhang,L. Zhang and D. L. Ma.(2020).Method for absolute measurement of flat surface.Applied Optics,59(33),10584-10590.
MLA	L. S. Yan,F. Z. Li,X. K. Wang,H. D. Zhang,L. Zhang and D. L. Ma."Method for absolute measurement of flat surface".Applied Optics 59.33(2020):10584-10590.

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