Changchun Institute of Optics,Fine Mechanics and Physics,CAS
Method for absolute measurement of flat surface | |
L. S. Yan,F. Z. Li,X. K. Wang,H. D. Zhang,L. Zhang and D. L. Ma | |
2020 | |
发表期刊 | Applied Optics |
ISSN | 1559-128X |
卷号 | 59期号:33页码:10584-10590 |
摘要 | Interferometry is a relative measurement method for optical surface testing, and thus its testing accuracy depends on the accuracy of the reference surface. Absolute measurement is one of the most effective methods to improve the testing accuracy in interferometry. We present an efficient absolute measurement method based on Zernike polynomial fitting algorithms. With our proposed method, the profiles of both the test surface and the reference surface can be calculated simultaneously. We further carried out simulation analysis to scientifically evaluate the test accuracy of the proposed method. Finally, we conducted actual experiments to demonstrate the feasibility and practicability of our method. (C) 2020 Optical Society of America |
DOI | 10.1364/ao.403268 |
URL | 查看原文 |
收录类别 | SCI ; EI |
语种 | 英语 |
引用统计 | |
文献类型 | 期刊论文 |
条目标识符 | http://ir.ciomp.ac.cn/handle/181722/64674 |
专题 | 中国科学院长春光学精密机械与物理研究所 |
推荐引用方式 GB/T 7714 | L. S. Yan,F. Z. Li,X. K. Wang,H. D. Zhang,L. Zhang and D. L. Ma. Method for absolute measurement of flat surface[J]. Applied Optics,2020,59(33):10584-10590. |
APA | L. S. Yan,F. Z. Li,X. K. Wang,H. D. Zhang,L. Zhang and D. L. Ma.(2020).Method for absolute measurement of flat surface.Applied Optics,59(33),10584-10590. |
MLA | L. S. Yan,F. Z. Li,X. K. Wang,H. D. Zhang,L. Zhang and D. L. Ma."Method for absolute measurement of flat surface".Applied Optics 59.33(2020):10584-10590. |
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Method for absolute (6876KB) | 期刊论文 | 出版稿 | 开放获取 | CC BY-NC-SA | 浏览 下载 |
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