Grating eccentricity monitoring system for image-based angular displacement measurement

doi:10.3788/OPE.20202805.1038

CIOMP OpenIR

	Grating eccentricity monitoring system for image-based angular displacement measurement
	Y.-Z. Wang,H. Yu,J. Yi,S.-W. Zhang and Z.-X. Wei
	2020
发表期刊	Guangxue Jingmi Gongcheng/Optics and Precision Engineering
ISSN	1004924X
卷号	28 期号:5 页码:1038-1045
摘要	In an image-based angular displacement measuring device, the installation eccentricity of the calibration grating directly affects the accuracy of angular displacement measurements. In this paper, a system for debugging the eccentricity of the grating in the angular displacement measuring device was designed. First, according to the mechanism of image-based angular displacement measurement, a method for monitoring the eccentricity of the calibration grating was proposed utilizing a linear array image sensor. A model of the eccentricity monitoring signal on the image sensor was subsequently established, and a mechanism for changing the signal was determined. Finally, an experiment on a certain type of angular displacement measurement device was carried out and debugging suggestions were provided. The experiment demonstrates that the adjustment reduces the root mean square error from 1 017" to 12.8".The eccentricity monitoring system designed in this paper can achieve installation and debugging of the calibration grating with high precision, and improve the efficiency of mass production of image-based angular displacement measurement devices. 2020, Science Press. All right reserved.
DOI	10.3788/OPE.20202805.1038
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收录类别	EI
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文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64545
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y.-Z. Wang,H. Yu,J. Yi,S.-W. Zhang and Z.-X. Wei. Grating eccentricity monitoring system for image-based angular displacement measurement[J]. Guangxue Jingmi Gongcheng/Optics and Precision Engineering,2020,28(5):1038-1045.
APA	Y.-Z. Wang,H. Yu,J. Yi,S.-W. Zhang and Z.-X. Wei.(2020).Grating eccentricity monitoring system for image-based angular displacement measurement.Guangxue Jingmi Gongcheng/Optics and Precision Engineering,28(5),1038-1045.
MLA	Y.-Z. Wang,H. Yu,J. Yi,S.-W. Zhang and Z.-X. Wei."Grating eccentricity monitoring system for image-based angular displacement measurement".Guangxue Jingmi Gongcheng/Optics and Precision Engineering 28.5(2020):1038-1045.

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