Fabrication of grooves on polymer-derived SiAlCN ceramics using femtosecond laser pulses

doi:10.1016/j.ceramint.2020.01.209

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	Fabrication of grooves on polymer-derived SiAlCN ceramics using femtosecond laser pulses
	Y. G. Chen,Y. J. Cao,Y. G. Wang,L. G. Zhang,G. Shao and J. F. Zi
	2020
发表期刊	Ceramics International
ISSN	0272-8842
卷号	46 期号:8 页码:11747-11761
摘要	In this study, grooves were fabricated on the surface of fully dense polymer-derived SiAlCN ceramics. Industrial femtosecond laser source was used at wavelength of 1030 nm with pulse duration of 290 fs and repetition rate of 100 kHz. Moreover, comprehensive study was carried out to evaluate the influence of scan speed and energy fluence on grooves quality, including the heat-affected zone around the laser-machined grooves, microstructures of laser-irradiated surface, and cross-section morphology of grooves. A series of grooves with width in the range of 30-80 mu m and depth below 280 mu m was successfully fabricated using femtosecond laser pulse. Laser parameters were optimized to obtain grooves with satisfying surface quality. Furthermore, formation and disappearance of laser-induced periodic surface structures were systematically investigated. This study proposes fabrication of grooves on SiAlCN ceramics via laser processing, which provides precise method for fabrication of microstructure with fascinating properties.
DOI	10.1016/j.ceramint.2020.01.209
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收录类别	SCI ; EI
语种	英语
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/64516
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Y. G. Chen,Y. J. Cao,Y. G. Wang,L. G. Zhang,G. Shao and J. F. Zi. Fabrication of grooves on polymer-derived SiAlCN ceramics using femtosecond laser pulses[J]. Ceramics International,2020,46(8):11747-11761.
APA	Y. G. Chen,Y. J. Cao,Y. G. Wang,L. G. Zhang,G. Shao and J. F. Zi.(2020).Fabrication of grooves on polymer-derived SiAlCN ceramics using femtosecond laser pulses.Ceramics International,46(8),11747-11761.
MLA	Y. G. Chen,Y. J. Cao,Y. G. Wang,L. G. Zhang,G. Shao and J. F. Zi."Fabrication of grooves on polymer-derived SiAlCN ceramics using femtosecond laser pulses".Ceramics International 46.8(2020):11747-11761.

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