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Using a unique mirror to minimize the effect of ruling engine cosine error on grating performance
Mi, X. T.; Zhang, S. W.; Yu, H. Z.; Yu, H. L.; Cong, M.; Qi, X. D.
2018
发表期刊Applied Optics
ISSN1559-128X
卷号57期号:35页码:10146-10151
摘要The cosine error of the diffraction grating ruling engine is a systematic error caused by the measurement system. This error affects grating performance directly. To reduce the effects of the cosine error on grating performance, we analyze the cause of the cosine error, establish a mathematical model based on the error and the related grating indicators, and propose a method to reduce the error. To validate the proposed method, we present the results of grating ruling experiments performed before and after cosine error correction, which show that the method effectively reduces the cosine error effects. (C) 2018 Optical Society of America.
关键词interferometric control echelle gratings resolution carriage Optics
DOI10.1364/ao.57.010146
收录类别SCI ; EI
引用统计
文献类型期刊论文
条目标识符http://ir.ciomp.ac.cn/handle/181722/61218
专题中国科学院长春光学精密机械与物理研究所
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GB/T 7714
Mi, X. T.,Zhang, S. W.,Yu, H. Z.,et al. Using a unique mirror to minimize the effect of ruling engine cosine error on grating performance[J]. Applied Optics,2018,57(35):10146-10151.
APA Mi, X. T.,Zhang, S. W.,Yu, H. Z.,Yu, H. L.,Cong, M.,&Qi, X. D..(2018).Using a unique mirror to minimize the effect of ruling engine cosine error on grating performance.Applied Optics,57(35),10146-10151.
MLA Mi, X. T.,et al."Using a unique mirror to minimize the effect of ruling engine cosine error on grating performance".Applied Optics 57.35(2018):10146-10151.
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