Using a unique mirror to minimize the effect of ruling engine cosine error on grating performance

doi:10.1364/ao.57.010146

CIOMP OpenIR

	Using a unique mirror to minimize the effect of ruling engine cosine error on grating performance
	Mi, X. T.; Zhang, S. W.; Yu, H. Z.; Yu, H. L.; Cong, M.; Qi, X. D.
	2018
发表期刊	Applied Optics
ISSN	1559-128X
卷号	57 期号:35 页码:10146-10151
摘要	The cosine error of the diffraction grating ruling engine is a systematic error caused by the measurement system. This error affects grating performance directly. To reduce the effects of the cosine error on grating performance, we analyze the cause of the cosine error, establish a mathematical model based on the error and the related grating indicators, and propose a method to reduce the error. To validate the proposed method, we present the results of grating ruling experiments performed before and after cosine error correction, which show that the method effectively reduces the cosine error effects. (C) 2018 Optical Society of America.
关键词	interferometric control echelle gratings resolution carriage Optics
DOI	10.1364/ao.57.010146
收录类别	SCI ; EI
引用统计
文献类型	期刊论文
条目标识符	http://ir.ciomp.ac.cn/handle/181722/61218
专题	中国科学院长春光学精密机械与物理研究所
推荐引用方式 GB/T 7714	Mi, X. T.,Zhang, S. W.,Yu, H. Z.,et al. Using a unique mirror to minimize the effect of ruling engine cosine error on grating performance[J]. Applied Optics,2018,57(35):10146-10151.
APA	Mi, X. T.,Zhang, S. W.,Yu, H. Z.,Yu, H. L.,Cong, M.,&Qi, X. D..(2018).Using a unique mirror to minimize the effect of ruling engine cosine error on grating performance.Applied Optics,57(35),10146-10151.
MLA	Mi, X. T.,et al."Using a unique mirror to minimize the effect of ruling engine cosine error on grating performance".Applied Optics 57.35(2018):10146-10151.

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Using a unique mirro（877KB）	期刊论文	出版稿	开放获取	CC BY-NC-SA	浏览请求全文